1. M.Anderle, D.Bassi, S.Iannotta, S.Marchetti and G.Scoles, “Spin flip experiments with hydrogen beams”; 7th Intern. Symposium on Molecular Beams, Riva del Garda (I), May 29-June 2, 1979.
2. M.Anderle, D.Bassi, S.Iannotta, and G.Scoles, “Spin polarized atomic hydrogen diffraction experiments from alkali halides surfaces”; 7th Intern. Symposium on Molecular Beams, Freiburg (D), June 13-17, 1983.
3. M.Anderle and C.M.Loxton, "On the broadening of SIMS measured interface by ion beam mixing"; 7th Intern. Conf. Ion Beam Analysis IBA '85, Berlin (FRG), July 7-12, 1985.
4. G.Queirolo, P.Caprara, G.Ottaviani, M.Anderle and D.Bassi; "Current effects in BF2 implants in silicon"; Symp. on Atomic and Surface Physics SASP '86. Obertraun (A), February 9 -15, 1986 and Intern. Conf. Ion Beam Modification Materials IBMM '86, Catania (I), 9 -13 June 1986.
5. M.Anderle, R.Canteri e D.Bassi; "Application of Secondary Ion Mass Spectrometry (SIMS) to semiconductor characterization"; 1° National Congress of the Matter Structure; Genova (I), 24-27 June 1986.
6. M. Anderle, D.Bassi and R.Canteri; "Si/SiO2 Interface profiling by SIMS: the dependence on the film doping procedure"; 4th Intern. Conf. Quantitative Surface Analysis QSA-4. Teddington (UK), November 18-20 1986.
7. M.Anderle, R.Canteri, P.Caprara and G. Queirolo; "Quantitative SIMS analysis of BF2 implanted and diffused layers: Comparison with carrier profiles"; SIMS VI Int. Conf.. Versailles (F), September 13-17, 1987.
8. M.Anderle, R.Canteri, P.Cagnoni, A.Sandrinelli and S.Pizzini; "Detection of oxygen, carbon and deep level impurities segregation at grain boundaries in polycrystalline silicon”; SIMS VI Int. Conf.. Versailles (F), September 13-17, 1987.
9. M.Anderle, R.Canteri, G.Queirolo, D.Robba; "Quantitative SIMS analysis of BF2 implanted silicon"; X National Congress on Vacuum Science and Technology, Stresa (I), October 12-17, 1987.
10. R.Canteri and M.Anderle; "Study of grain boundary segregation by SIMS"; Cameca European Users Meeting, Luxembourg, March 28-29, 1988.
11. M.Anderle and R.Canteri; "Quantitative SIMS analysis on molecular ion implanted silicon"; FICH-6 Workshop, Structural and Microanalytical Characterization of Advanced Materials.; Turin (I), April 13-14, 1988.
12. R.Canteri, L.Moro, G.Queirolo and M.Anderle; "Matrix effects and quantitative analysis in SIMS/SNMS depth profiling implanted silicon"; 5th Intern. Conference on Quantitative Surface Analysis (QSA-5) London, 15-18 november 1988.
13. L.Moro, M.Bianchi e M.Anderle; "Chemical characterization of thin films employed in silicon technology by Sputtered Neutral Mass Spectrometry (SNMS)"; Padova SIMS '88, Padova (I), 1-2 December 1988.
14. R.Canteri, M.Fedrizzi e M.Anderle; "Mixing, chemical effects and quantitative analyses in SIMS depth profiling semiconductor materials"; Padova SIMS '88. , Padova (I), 1-2 December 1988.
15. L.Moro, P.Lazzeri, G.Ottaviani, P.Serra and M.Anderle; "SNMS and RBS/NRA characterizations of doped oxides for microelectronic applications"; SIMS VII Int. Conf.. Monterey (CA), September 3-8, 1989.
16. R. Canteri, R.Angelucci and M.Anderle; "SIMS depth profiling of implanted silicide/silicon layers"; SIMS VII Int. Conf.. Monterey (CA), September 3-8, 1989.
17. S.W.MacLaren, J.E.Baker, L.J.Guido, N.Holonyak, M.Anderle and C.M.Loxton; "Instrumental and sample effects on depth resolution when sputtering Si/SiO2 and compound semiconductors using SIMS and SNMS"; SIMS VII Int. Conf.. Monterey (CA), September 3-8, 1989.
18. R.Canteri, L.Moro and M.Anderle; "SIMS and SNMS depth profiling of implanted silicon: matrix effects and quantitative analysis"; SIMS VII Int. Conf.. Monterey (CA), September 3-8, 1989.
19. M.Anderle; "Applications of SNMS in VLSI technology: studies of dopant redistribution in heterogeneous layers"; PITSA Int. Workshop on Postionization Techniques in Surface Analysis. Kaiserslautern (FRG), October 1-3, 1989
20. P.Lazzeri, L.Moro and M.Anderle; "Study of the influence of a LN2 cooling system in SNMS analyses"; 2nd European Vacuum Conference. Trieste (I), 21-26 May 1990.
21. L.Meda, C.F.Cerofolini, G.Ottaviani, R.Tonini, F.Corni, M.Anderle, R.Canteri and R.Dierckx; "Evidence of Molecular Hydrogen after Implantation in Silicon"; 6th Symposium on Hydrogen in Semiconductors. Trieste (I), July 12-14, 1990.
22. L.Moro, P.Lazzeri, G.Ottaviani, L.Bacci, G.Queirolo and M.Anderle; "SNMS studies of ULSI gate interconnection structures"; 6th Arbeitstagung "Angewandte Oberflächen analytik" Kaiserslautern (FRG), 9-12 July 1990.
23. L.Moro, R.Canteri and M.Anderle; "Comparison between SIMS and SNMS in application to microelectronics materials"; PITSA '91-2° Int. Workshop on Postionization Techniques in Surface Analysis; PennState-University Park (PA). May 15-17, 1991.
24. M.Anderle, S.P.Jeng, S.S.Dana and G.W.Rubloff; "Application of in-situ SIMS/SNMS/TDMS for interface and thin film charcterization in ultraclean, integrated processing"; SIMS VIII Int. Conf.. Amsterdam, September 15-20, 1991.
25. L.Moro, R.Canteri and M.Anderle; “Depth Profiling of Multilayer Samples: A Comparison between SNMS and (MCs)+ SIMS”; SIMS VIII Int. Conf.. Amsterdam, September 15-20, 1991.
26. R.Canteri, L.Moro and M.Anderle; “Matrix Effects and Quantitative Analysis in Silicon: Effects in the Presence of Localized Reactive Species”; SIMS VIII Int. Conf.. Amsterdam, September 15-20, 1991.
27. M.Liehr, S.S.Dana, M.Anderle; "Nucleation and sub-monolayer growth of silicon on SiO2 in SiH4 CVD as studied by Hydrogen desorption/titration"; AVS 38th National Symposium, Seattle, Washington USA, November 11-15, 1991
28. S.S.Dana, M.Anderle, G.W.Rubloff and M.Liehr,; "UHV-RTCVD studies of rough polysilicon thin film growth"; AVS 38th National Symposium, Seattle, Washington USA, November 11-15, 1991
29. S.-P.Jeng, T.-P.Ma, R.Canteri, M.Anderle, S.S.Dana, G.W.Rubloff; "Diffusion of fluorine in MOS structures; AVS 38th National Symposium, Seattle, Washington USA, November 11-15, 1991
30. M.Anderle, S.S.Dana, M.Liehr and G.W.Rubloff; "Surface control of Si nucleation, growth and morphology in VLPCVD"; MRS Spring Meeting. S.Francisco, April 1992.
31. M.Anderle; "Microanalysis support in VLSI Technology"; Alpe Adria Workshop on "The impact of microelectronics technology in industrial application for small and medium industries". Trento (I), June 11-12, 1992.
32. M.Anderle; "Nucleation and growth of Si on SiO2 during SiH4 low pressure chemical vapor deposition as studied by hydrogen desorption tritation"; National Research Council-CNR Annual Meeting, Modena, December 14-16, 1992
33. M.Anderle, L.Calliari, R.Canteri, M.Fedrizzi; "Carachterization of porous silicon by Auger, SIMS, and SEM"; INSEL 1993-National Meeting on light emitter siliconIncontro, Trento (I), April 6, 1993.
34. S.S.Dana, M.Anderle and G.W.Rubloff; "Nucleation, growth and microstructure of polysilicon on SiO2 in integrated processing for FET gate dielectric structures"; European-MRS Spring Meeting. Strasbourg (F), May 4-7, 1993.
35. M.Anderle R.Canteri, M.Fedrizzi, P.Lazzeri and L.Moro; "Observation of metal contamination in hard plant tissues by SIMS"; "Massa 93 Chimica e Biotecnologie Agro-Alimentari, Lacco Ameno-Ischia (I), September 13-18, 1993.
36. M.Anderle, R.Canteri, M.Fedrizzi, P.Lazzeri and L.Moro; “SIMS and SNMS Depth Profiling of III-V Compound Samples”; SIMS IX Int. Conf. Yokohama (J), November 7-12, 1993.
37. I.Shareef, G.W.Rubloff, M.Anderle, W.N.Gill, J.Cotte, D.-H.Kim; “Sub-atmospheric CVD (SACVD) Ozone/TEOS process for SiO2 trench filling”; 41st National Symposium of the American Vacuum Society. Denver (CO), October 23-28, 1994.
38. L.L.Tedder, G.W.Rubloff, I.Shareef, M.Anderle, D.-H.Kim, and G.N.Parsons; “Real-time process and products diagnostic in RTCVD using in-situ mass spectrometric sampling”; 41st National Symposium of the American Vacuum Society. Denver (CO), October 23-28, 1994.
39. R.Canteri, M.Anderle, R.Antolini, L.Feigin, I.Myagkov; “Deposition of LB films of 14-H-perfluorotetradecanoic acid and study of their structure and electrical properties”; 7th Intern. Conf. on Organized molecular Films. Ancona (I), September 10-15, 1995.
40. S.Ferrari, R.Canteri, C.Paternolli, M.Anderle; “Langmuir-Blodgett fluorurated polymer film preparation and their characterization by XRD e TOF-SIMS.”; XIII Italian Vacuum Society National Symposium, Milano (I), February 14-16, 1996.
41. M.Bersani, L.Moro, R.Canteri, M.Anderle, C.Savoia, A.Losavio, G.Queirolo; “SIMS in the microelectronics process and technology: an example of effective cooperation”; XIII Italian Vacuum Society National Symposium, Milano (I), February 14-16, 1996.
42. M.Anderle; “In situ diagnostic and control of CVD deposition and chemical etching”; XIII Italian Vacuum Society National Symposium, Milano (I), February 14-16, 1996.
43. M.Anderle, R.Canteri, S.Ferrari and G.Speranza; "Structural characterization of Langmuir-Blodgett (LB) films by Time of Flight (TOF) Sims and Xps"; 43rd National Symposium of the American Vacuum Society. Philadelphia (PE), October14-18, 1996.
44. M.Surendra, C.R.Guarnieri and M.Anderle; "Rf sensors for plasma process monitoring"; 49th Annual Gaseous Electronic Conference. Argonne (Il), October 20-24, 1996.
45. A.Cricenti, R.Generosi, M.A.Scarselli, P.Perfetti, P.Siciliano, A.Serra, A.Tepore, L.Vanzetti M.Anderle and C.Coluzza; "Spectromicroscopy applied to the characterization of Pt-SnO2 thin films for gas sensors"; CNR-GNSM 21st Annual Meeting on Advances in Surface and Interface Physics.; Modena (I), December 1996.
46. R.Rella, P.Siciliano, M.Di Giulio, L.Vanzetti, M.Anderle, A.Cricenti, R.Generosi, C.Coluzza; “Vanadium oxide based gas sensors: morphological, chemical and electrical characterization”, 11th European Conference on Solid-State Transducers –Eurosensors XI-, Warsaw, PL, September 21-24, 1997.
47. R.Canteri , C.Malacarne, A.Rigo, F.Vianello, L.Zennaro, M.Scarpa, and M.Anderle; “Characterization of functional films on solid substrates by TOF-SIMS"; Secondary Ion Mass Spectrometry (SIMS XI) International Conference.; Orlando (FL), September 7-12, 1997.
48. M.Bersani , M.Fedrizzi, M.Ferroni, G.Savoia and M.Anderle; “Quantitative SIMS depth distribution of nitrogen in Nitridated Oxide at the SiO2/Si interface"; Secondary Ion Mass Spectrometry (SIMS XI) International Conference; Orlando (FL), September 7-12, 1997.
49. M.Bersani, M.Fedrizzi, M.Sbetti and M.Anderle; “ULSI Technology and Materials: Quantitative answers by combined mass spectrometry surface techniques”; 1998 International Conference on Characterization and Metrology for ULSI Technology; Gaithersburg (MD) USA, March 23-27, 1998
50. M.Sbetti, M.Bersani, M.Fedrizzi, S.a Beccara and M.Anderle; “Dopant redistribution analysis in TiSi2/Si systems by SIMS”; 1998 International Conference on Characterization and Metrology for ULSI Technology; Gaithersburg (MD) USA, March 23-27, 1998
51. M.Bersani , M.Sbetti and M.Anderle; “A comparison between mass spectrometry techniques on oxynitrides"; 2nd French-Italian Symposium on SiO2 and Advanced Dielectrics; L'Aquila, June 15-17, 1998.
52. M.Bersani , L.Vanzetti, M.Sbetti and M.Anderle; “Characterization of RTP Oxynitrides by SIMS and XPS analyses"; 14th International Vacuum Congress (IVC-14). Birmingham (UK), 31 August-4 September, 1998.
53. G.Speranza, N.Laidani, L.Calliari and M.Anderle; "Effect of Si on the electronic structure of sputter-deposited C film: an electron spectroscopy study"; Diamond 1998 International Conference. Creta, September 13-18, 1998.
54. E.Paparazzo, L.Moretto, M.Bersani, M.Fedrizzi and M.Anderle; "Surface analysis studies of Bidri archaeomaterials from the collection of British Museum"; AVS 45th International Symposium. Baltimore (MD), November 2-6, 1998.
55. “Tof-SIMS characterization of frozen hepatic tissue”, R.Canteri, M.Fedrizzi and M.Anderle, 3° MS-PHARMADAY MASSA 99, Siena, June 1-4, 1999
56. M.Anderle, N.Laidani, N.Nefedov and V.Micheli; “Chemical and structural properties of Zirconia-Carbon Films”; 11th International Conference on Thin Films, Cancun, Mexico, August 30-September 3, 1999.
57. M.Bersani , M.Sbetti, L.Vanzetti and M.Anderle; “Furnace and RTP nitridation of ultrathin oxide films by NO and N2O: Sims and Tof-Sims characterization"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.
58. M.Sbetti, M.Bersani, L.Vanzetti, R.Canteri and M.Anderle; “Sub-keV Mass Spectrometry analyses on thin oxynitride films "; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.
59. M.Bersani, R.Canteri, V.Micheli, M.Sbetti, L.Vanzetti and M.Anderle; “Which colour?"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.
60. R.Canteri, G.Speranza, M.Anderle, S.Turri, S.Radice and T.Trombetta; “Characterization of perfluoropolyether-urethane coating by Tof-SIMS and XPS"; Secondary Ion Mass Spectrometry (SIMS XII) International Conference; Brussels (Belgium), September 5-11, 1999.
61. G.Speranza, N.Laidani, L.Calliari, and M.Anderle; “Towards a quantitative evaluation of the sp2/sp3 ratio in C-based systems”; Diamond ’99 Conference, Prague, 13-17 September 1999
62. L.Vanzetti, M.Bersani, M.Sbetti and M.Anderle; “XPS and SIMS depth profiling of oxynitrides”; 8th European Conference on Applications of Surface and Interface Analysis – ECASIA ’99; Sevilla (Spain), 4th-8th October 1999.
63. M.Anderle, R.Canteri, E.Carli, S.Janikowska, A.Lui, C.Pederzolli, G.Speranza, D.Maniglio, C.Della Volpe; “Microbial adhesion on polymer: Role of morphological and chemical properties in the micro-organism behaviour”; 47th International Symposium: Vacuum, thin films, surfaces/interfaces and processing, Boston (USA), October 2-6, 2000.
64. N.Laidani, G.Speranza, L.Calliari, V.Micheli and M.Anderle; “Chemical and microstructural characterization of silicon-containing carbon films”; E-MRS-Spring Meeting 2001, Symposium C, Strasbourg June 5-8, 2001
65. C.Della Volpe, S.Siboni, D.Maniglio, M.Morra, C.Cassinelli, M.Anderle, G.Speranza, R.Canteri, C.Pederzolli, G.Gottardi, S.Janikowska; “Recent theoretical advancements in the application of Good-van Oss acid-base theory to the analysis of polymer surfaces. (I) General”; 3rd International Symposium on acid-base interactions: relevance to the adhesion, Newark, June 13-15, 2001.
66. C.Della Volpe, S.Siboni, D.Maniglio, M.Morra, C.Cassinelli, M.Anderle, G.Speranza, R.Canteri, C.Pederzolli, G.Gottardi, S.Janikowska; “Recent theoretical advancements in the application of Good-van Oss acid-base theory to the analysis of polymer surfaces. (II) Some peculiar cases.”; 3rd International Symposium on acid-base interactions: relevance to the adhesion, Newark, June 13-15, 2001.
67. G.Gottardi, M.Anderle, R.Canteri, E.Carli, M.Grossello, A.Lui, D.Maniglio, L.Pasquardini, C.Pederzolli, C.Della Volpe, S.Siboni and G.Speranza; “Adhesion of staphylococcus epidermidis to polymer surfaces”; CIRMIB-AIMAT National Meeting “2001 Biomaterial Days”, Ischia Porto (I), July 20-21, 2001.
68. T.Toccoli, M.Anderle, A.Boschetti, C.Corradi, L.Guerini, M.Mazzola, P.Siciliano, and S.Iannotta; “Growth of organic and metal oxide films for gas and VOC Sensing applications by seeded supersonic beams”, International Workshop “Materials and Technologies for Chemical Sensors – MATCHEMS”, Brescia (I), September 13-14, 2001.
69. M.Anderle and C.Bellachioma, C.Benvenuti, E.Broilo, S.Calatroni, P.Chiggiato, S.Clair, S.Elliot, J.Kenny and W.Vollenberg; “UHV Compatibility of Organic Materials”; IUVSTA 15th International Vacuum Congress and AVS 48th International Symposium, S.Francisco (USA), October 28-November 2, 2001
70. G.Speranza, R.Canteri, C.Pederzolli, G.Gottardi, L.Pasquardini, E.Carli, M.Grossello, A.Lui and M.Anderle; “Do the chemical properties of polymer surfaces influence the bacterial adhesion?”; IUVSTA 15th International Vacuum Congress and AVS 48th International Symposium, S.Francisco (USA), October 28-November 2, 2001
71. P.Lazzeri, G.Clauser, A.Lui, E.Iacob, G.Tonidandel and M.Anderle; “Tof-Sims and XPS Characterization of urban aerosols for pollution studies”; 13th International Conference on Secondary Ion Mass Spectrometry and related topics, SIMS XIII, Nara, Japan, November 11-16, 2001.
72. M.Bersani, D.Giubertoni, M.Barozzi, E.Iacob, L.Vanzetti, M.Anderle, P.Lazzeri, B.Crivelli, and F.Zanderigo; “D-Sims and TOF-SIMS quantitative depth profiles on ultra thin oxinitrides”; 13th International Conference on Secondary Ion Mass Spectrometry and related topics, SIMS XIII, Nara, Japan, November 11-16, 2001.
73. N.Laidani, L.Calliari, G.Speranza, V.Micheli and M.Anderle; “Synthesis of amorphous/polymeric superlattice carbon film and control of layer structure and stress”; E-MRS-Spring Meeting 2002, Symposium Q, Strasbourg (F), June 18-21, 2002.
74. M.Bersani, P.Lazzeri, D.Giubertoni, M.Barozzi, E.Boscolo Marchi and M.Anderle; “Arsenic shallow implant characterization by magnetic sector and time of flight SIMS instruments”; Ion Implantation Technology Conference; Taos (NM) USA, September 23-27, 2002.
75. E.Iacob, M.Bersani, A.Lui, L.Vanzetti, D.Giubertoni, M.Barozzi, and M.Anderle; “Sample topography developed by sputtering in Cameca instruments”; AVS 49th International Symposium; Denver (CO) USA, November 4-8, 2002.
76. R.Canteri, G.Speranza, M.Anderle; S.Turri, S.Radice; “Surface Characterization of Fluorinated Polyether Ionomers from Aqueos Dispersions”; AVS 49th International Symposium; Denver (CO) USA, November 4-8, 2002.
77. P.Lazzeri, L.Vanzetti, M.Bersani, M.Anderle; J.J.Park, Z.Lin, G.Y.Yang, R.M.Briger, G.W.Rubloff; “Materials transformation and kinetics in the formation of porous low-K polymer dielectrics for advanced interconnect technology”; AVS 49th International Symposium; Denver (CO) USA, November 4-8, 2002.
78. L.Vanzetti, E.Iacob, M.Barozzi, D.Giubertoni, M.Bersani, M.Anderle; P.Bacciaglia, B.Crivelli, M.L.Polignano, M.E. Vitali; “Nitride Silicon-Silicon Dioxide Interface: Electrical and Phisico-Chemical Characterization by Complementary Surface Techniques”; AVS 49th International Symposium; Denver (CO) USA, November 4-8, 2002.
79. P. Lazzeri, L. Vanzetti, E. Iacob, M. Bersani, M. Anderle, J.J. Park, Z. Lin R.M. Briber, G.W. Rubloff, R.D. Miller,“Material characterization and the formation of nanoporous PMSSQ low-k dielectrics”; Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin (TX) USA, March 24-28, 2003.
80. M. Bersani, D. Giubertoni, M. Barozzi, S. Bertoldi, L. Vanzetti, E. Iacob and M.Anderle, “In situ sputtering rate measurement by laser interferometer applied to SIMS analyses”; Characterization and Metrology for ULSI Technology: 2003 International Conference, Austin (TX) USA, March 24-28, 2003.
81. D.Giubertoni, M.Barozzi, E. Boscolo, M.Anderle, and M.Bersani, “Boron ultra shallow SIMS profiles optimization using oblique incidente oxygen beam”; Ultra Shallow Junctions Conference, Santa Cruz, (CA) USA, April 30, 2003.
82. P. Lazzeri, G.W. Rubloff, M. Anderle, M. Bersani, R.M. Briber, Z. Lin, R.D. Miller, J.J. Park, and L. Vanzetti, “ToF-SIMS Study of PMSSQ Polymerization and Kinetics for the Manufacturing of Nanoporous Low-K Dielectrics“; 2003 International Interconnect Technology Conference (IITC 2003), San Francisco, USA, 2-4 June, 2003,
83. T.Toccoli, A. Pallaoro, N. Coppedè, S. Iannotta,E. Barborini, P. Milani, A.M. Taurino, P. Siciliano, E. Iacob and M. Anderle, “Nanostructures by assembling clusters and molecules from supersonic beams: A novel approach for gas sensing devices“; E-MRS 2003 Spring Meeting, Strasbourg, June 10-13, 2003.
84. E. Iacob, M. Anderle, M. Bersani, N. Coppedè, P. Lazzeri, V. Micheli, A. Pallaoro, T. Toccoli and S. Iannotta, “Morphology structure and interfaces in the preparation of films by SUMBE for gas sensing“; E-MRS 2003 Spring Meeting, Strasbourg, June 10-13, 2003.
85. G. Gottardi, N. Laidani, M. Anderle, R.S. Brusa, M. Spagolla, “Structure and bonding studies of a-C:H films produced by plasma enhanced CVD using CH4-CO2 mixtures“; 16th International Symposium on Plasma Chemistry (ISPC-16), Taormina, Italy, June 22-27, 2003.
86. M. Barozzi, D. Giubertoni, M. Anderle and M. Bersani, “Arsenic shallow depth profiling: accurate quantification in SiO2/Si stack”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003
87. M. Barozzi, D. Giubertoni, M. Sbetti, M. Anderle and M. Bersani, “Sample holder implement for very small samples on SC-Ultra SIMS instrument”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003
88. M. Barozzi, D. Giubertoni, M. Anderle and M. Bersani, “Short-term and long-term repeatability for Cameca SC-Ultra SIMS measurements”; The 14th International Conference on Secondary Ion Mass Spectrometry (SIMS XIV), San Diego, (CA), USA, September 14-19, 2003
89. P. Lazzeri, J.J. Park, Z. Lin, G.W. Rubloff, R.M. Briber, R.D. Miller, L. Vanzetti, M. Anderle, M. Bersani, “Processing, and Characterization of PMSSQ-Based Materials for Nanoporous Low-K Dielectrics”; AVS 50th International Symposium, Baltimore, MD, November 2-7, 2003.
90. C. Pederzolli, L. Lunelli, G. Speranza, P. Villani, L. Pasquardini, R. Canteri, M. Anderle, J.J.Park, Li-Qun Wu, Hyunmin Yi, Sheng Lie, R. Ghodssi, W. E. Bentley, G. F Payne, G. W. Rubloff, “Materials and surface characterization of electrodeposited polysaccharide chitosan film as a platform for biomolecular reactions in bioMEMS systems”; AVS 50th International Symposium, Baltimore, MD November 2-7, 2003.
91. G. Speranza, C. Pederzolli, M. Vinante, L. Lunelli, R. Canteri, M. Fedrizzi, and M. Anderle, “Physico-chemical and biological characterization of deposited polysaccharide chitosan films”; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004
92. G. Speranza, C. Pederzolli, M. Vinante, L. Lunelli, R. Canteri, L. Pasquardini, J. J. Park, G. F. Payne, G. W. Rubloff and M. Anderle, “Physico-chemical and biological characterization of deposited polysaccharide chitosan films as a platform for living cells in BioMEMS systems”; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004
93. L. Ling, X. Hua, X. Li, G. S. Oehrlein, E. A. Hudson, P. Lazzeri and M. Anderle, “Investigation of Surface Modifications of 193 nm and 248 nm Photoresist Materials During Low-Pressure Plasma Etching”; 31st IEEE International Conference On Plasma Science, ICOPS 2004, Baltimore, MD, June 28 - July 1, 2004
94. X. Hua, C. Stolz, and G. S. Oehrlein,P. Lazzeri, N. Coghe, M. Anderle, C. K. Inoki, T. S. Kuan and P. Jiang, “Plasma-Surface Interactions of Nanoporous Silica During Plasma-Based Pattern Transfer Using C4F8 and C4F8/Ar Gas Mixtures”; 31st IEEE International Conference On Plasma Science, ICOPS 2004, Baltimore, MD, June 28 - July 1, 2004.
95. G. Gottardi, N. Laidani and M. Anderle, “Ion-induced effects on a-C:H film growth in a PACVD process with CH4-CO2 mixture: a mechanical and structural study“; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004.
96. P. Lazzeri, M. Anderle, X. Hua, E. Iacob, C. K. Inoki, P. Jiang, T. S. Kuan, and G. S. Oehrlein, “Chemical and morphological characterization of nanoporous silica low-k dielectrics etched in fluorocarbon plasmas”; IVC-16/ICSS-12/NANO-8, Venice, Italy, June 28 – July 2, 2004.
97. G. Gottardi, N. Laidani, R. Bartali, M. Filippi, L. Calliari, R.S. Brusa, S. Mariazzi, C. Macchi and M. Anderle, “Amorphous carbon films PACVD in CH4–CO2 under pulsed and continuous substrate bias conditions”; 15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides & Silicon Carbide (Diamond 2004), Riva del Garda (I), 12-17 September 2004.
98. S. Forti, C. Pederzolli, R. Canteri, M. Vinante, L. Vanzetti, L.Pasquardini, G. Gensini, S. Pascale and M. Anderle, “Plasma protein adsorption and platelet adhesion on cardiovascular materials: role of morphological and chemical properties in their hemocompatibility”; Presented at “Advances in tissues engineering and biology of heart valves“, Florence (I), September 15-18, 2004
99. P. Lazzeri, G.W. Rubloff, G. Oehrlein, R.M. Briber, H.-C. Kim, J. Wolf, M. Bersani and M. Anderle, “ToF-SIMS characterization of low-k dielectrics: from materials development to key integration issues in ULSI technology“; 4th European Workshop on Secondary Ion Mass Spectrometry, SIMS Europe 2004, Muenster (G), September 26-29, 2004.
100. X. Hua, T. Kwon, R. Phaneuf, G. S. Oehrlein, P. Lazzeri, M. Anderle, P. Jiang, C. K. Inoki and T. S. Kuan, “Instabilities of Nanoporous Silica (NPS) During Plasma-Based Pattern Transfer and Subsequent Resist Stripping”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004.
101. R.Canteri, C.Pederzolli, L.Lunelli, P.Villani, L.Pasquardini, M.Vinante, G.Speranza, S.Forti, M.Anderle, J.J.Park and G.W.Rubloff, “Development and characterization of RGD peptide coatings for cell adhesion”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004.
102. L. Ling, X. Hua, L. Zheng, G. S. Oehrlein,E. A. Hudson, P. Jiang, P. Lazzeri, M. Anderle and Y. Wang, “Fluorocarbon Surface Chemistry in Dual Frequency Capacitively Coupled Discharges for Dielectric Etching: A Comparison with Inductively Coupled Plasmas”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004.
103. M. Anderle, L. Pasquardini, L. Lunelli, R. Canteri, P. Villani, C. Pederzolli, “Development of an Antimicrobial Polymer Surface Coating for the Prevention of Staphylococcal Infections”, AVS 51st International Symposium, Anaheim, CA, November 14-19, 2004.
104. L. Ling, X. Hua, T. Kwon, S. Engelmann, R. Phaneuf, G. S. Oehrlein, E. A. Hudson,P. Lazzeri and M. Anderle, “Investigation of Surface Modifications of 193 nm and 248 nm Photoresist Materials During Low-Pressure Plasma Etching “, AVS ICMI ’05, Santa Clara (CA), March 21-23, 2005.
105. N. Ghalichechian, A. Modafe, P. Lazzeri, V. Micheli, M. Anderle and R. Ghodssi “Characterization of Benzocyclobutene and Chromium-Gold Film Interface for Application in Silicon Micromachining”, 2005 MRS Spring Meeting, S.Francisco, CA, March 28 – April 1, 2005.
106. G. Speranza, L. Minati, M. Anderle, “Modeling materials for photonic applications“, 1st Workshop on “Photoluminescence in rare earths: photonic materials and devices”, PRE05, Trento, Italy, May 2-3, 2005.
107. P. Lazzeri, X. Hua, G. Oehrlein, E. Iacob, M. Barozzi, M. Bersani and M. Anderle, “ToF-SIMS and AFM studies of low-k dielectric etching in fluorocarbon plasmas”, The 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV), Manchester (UK), September 12-16, 2005
108. D. Giubertoni, E. Iacob, M. Barozzi, S. Pederzoli, L. Vanzetti, M. Anderle and M. Bersani, “Boron Ultra Low Energy SIMS Depth Profiling improved by Rotating Stage”, The 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV), Manchester (UK), September 12-16, 2005
109. M. Bersani, D. Giubertoni, M. Barozzi, S. Pederzoli, M. Anderle, J. A. van den Berg, M. Werner, “Comparison between SIMS and MEIS Technique on Arsenic Ultra Shallow Characterization”, The 15th International Conference on Secondary Ion Mass Spectrometry (SIMS XV), Manchester (UK), September 12-16, 2005
110. S. Engelmann, T. Kwon, X. Hua, R. Phaneuf, G. S. Oehrlein, Y. C. Bae, D. Graves, E. Pargon, E. A. Hudson, P. Lazzeri and M. Anderle, “Interactions of Plasmas with Model Polymers for Advanced Photoresists”; AVS 52nd International Symposium, Boston, MA, October 30 – November 4, 2005.
111. G. Gottardi, N. Laidani, L. Calliari, M. Filippi, R.S. Brusa, C. Macchi, S. Mariazzi, M. Anderle, “Amorphous carbon thin films deposition by pulsed substrate biased PACVD using a CH4-CO2 gas misture”, AVS 52nd International Symposium, Boston, MA, October 30 – November 4, 2005.
112. S. Forti, M. Vinante, L. Pasquardini, L. Lunelli, L. Vanzetti, R. Canteri, C. Pederzolli, M. Anderle, S. Pascale, and G. Rossetti, “Role of the chemical and morphological surface properties in platelet bindings and protein adsorpion to biomaterial surfaces”, AVS 52nd International Symposium, Boston, MA, October 30 – November 4, 2005.
113. M. Vinante, C. Pederzolli, L. Pasquardini, L. Lunelli, R. Canteri, M. Anderle, C. Potrich, G. Viero, M. Dalla Serra, G. Prevost, and O. Joubert, “Controlled release of calixarenes from chitosan hydrogel coated polymeric surfaces as antimicrobial treatment of staphilococcal infections”, AVS 52nd International Symposium, Boston, MA, October 30 – November 4, 2005.
114. X. Hua, G.S. Oehrlein, P. Lazzeri, M. Anderle, “Nanoscale Plasma Processing of Substrates Using Moving Patterned Shutter”, AVS 52nd International Symposium, Boston, MA, October 30 – November 4, 2005.
115. N.Laidani, G.Gottardi, R.Bartali, V.Micheli, M.Anderle, “Optical and mechanical characterization of ZrO2-X-C films”, Symposium R, E-MRS Spring Meeting, Nice, France, May 29-June 2, 2006.
116. M.Bersani, G.Pepponi, D.Giubertoni, S.Gennaro and M.Anderle “Arsenic shallow distribution formed by solid phase epitaxial regrowth: an EXAFS and MEIS study”, IIT 2006, 16th Int. Conf. on Ion Implantation Technology, Marseille, France, June 11-16, 2006
117. S. Forti, L. Lunelli, A. Lui, L. Pasquardini, C. Pederzolli, L. Vanzetti, M. Vinante and M. Anderle, M. Giorcelli, S. Porro, S. Musso, M. Rovere, A. Tagliaferro, “Plasma protein adsorption and platelet adhesion on various carbon films”, SMAC 2006-6th Specialist Meeting on Amorphous Carbon,Heraclion, Crete, Greece, September 10 -13, 2006
118. L.Pasquardini, S.Fiorilli, S.Forti, L.Lunelli, C.Pederzolli, L.Vanzetti, M.Vinante, E.Garrone and M.Anderle, “Amino-silane and chitosan coated silicon substrates for DNA extraction”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
119. S.Forti, R.Canteri, R.Dell’Anna, C.Della Volpe, L.Lunelli, L.Pasquardini, L.Vanzetti, C.Pederzolli and M.Anderle, “The influence of materials surface properties on the polymerase activity in microchip-based PCR”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
120. S.Engelmann, R.L.Bruce, B.F.Smith, T.Kwon, R.Phaneuf, G.S.Oehrlein, E.A.Hudson, P.Lazzeri and M.Anderle, “Modifications of advanced photoresist polymers after plasma processing”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
121. D.G.Nest, M.Goldman, D.B.Graves, S.Engelmann, R.L.Bruce, B.F.Smith, T.Kwon, R.Phaneuf, G.S. Oehrlein, C.Andes, E.A.Hudson, P.Lazzeri and M.Anderle, “Study of energetic ion and radicals beams interacting with advanced photoresist polymers”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
122. M.Bersani, G.Pepponi, D.Giubertoni, S.Gennaro, M.Anderle, R.Doherty and M.A.Foad, “Arsenic ultra shallow junction deactivation investigated by multitechnique analytical approach”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
123. S.Kuo, G.S.Oehrlein, P.Jiang, P.Lazzeri, M.Bersani, S.Pederzoli, and M.Anderle, “Process performance of H2 remote plasma based photoresist ashing processes and their influence on ULK materials modifications”, AVS 53rd International Symposium & Exhibition, San Francisco, USA, November 12-17, 2006.
124. G. Gottardi, N. Laidani, V. Micheli, R. Bartali, M. Anderle “Effects of oxygen concentration in the Ar/O2 plasma on the bulk structure and surface properties of RF reactively sputtered Zirconia thin films”, Symposium Q, E-MRS 2007 Spring Meeting, Strasbourg, France, May 28-June 1, 2007
125. M.Barozzi, E.Iacob, L.Vanzetti, M.Bersani, M.Anderle, C.Kompocholis, M.Ghulinyan, P.Bellutti, G.Pucker, “Multilayer silicon rich oxy-nitride films characterizationby SIMS, VASE, and AFM”, 17th International Vacuum Congress, Stockholm, Sweden, July 2-6, 2007
126. R.Canteri, R.Dell’Anna, S.Forti, L.Lunelli, L.Pasquardini, L.Vanzetti, M.Anderle, C.Pederzolli. “Chemical characterization of Tag DNA polymerase adsorption on different surfaces”, AVS 54th International Symposium & Exhibition, Seattle, USA, October 14-19, 2007.
127. L. Henn-Lecordier, E.Robertson, P.Banerjee, G.W.Rubloff and M.Anderle, “Combinatorial strategy to address the complexities of surface chemistry and multicomponent materials in atomic layer deposition”, AVS – The Science and Technology Society 54th International Symposium & Exhibition, Seattle, USA, October 14-19, 2007.
128. L. Henn-Lecordier, M. Anderle and G.W. Rubloff, “Cross-flow ALD: strategies for optimization of ALD process recipes at wafer scale”, 8th International ALD Conference, Bruges (B), June 29 – July 2, 2008
129. C. Potrich, L. Lunelli, D. Vozzi, S. Forti, L. Pasquardini, L. Emanuela Vanzetti, M.Anderle, C. Pederzolli, “The influence of material surface properties on PCR Yield in Microsystems”, Regional Biophysics Conference 2009, Linz, Austria), February 10-14, 2009
130. D. Giubertoni, E. Iacob, M. Bersani, M.Anderle, R. Trotta, A. Polimeni, M. Capizzi, F. Martelli and S. Rubini, “Secondary ion mass spectrometry of deutered GaAsN on GaAs”, 17° International Conference on Secondary Ion Mass Spectrometry -SIMS XVII-, Toronto, Canada, September 14-18, 2009.
131. D. Giubertoni, E. Iacob, G. Pepponi, M. Bersani, M.Anderle, P. Hoenicke and B. Beckhoff, “Ultra low energy Boron ion implants in silicon analyzed by not-oxydizing O2+ bombardment and synchrotron radiation grazing incidence x-ray fuorescence”, 17° International Conference on Secondary Ion Mass Spectrometry -SIMS XVII-, Toronto, Canada, September 14-18, 2009.
132. L. Marocchi, L. Lunelli, L. Pasquardini, C. Potrich, L. Vanzetti, G. Guella, C. Pederzolli, M. Anderle “Chemical and morphological properties of amino-silane coated surfaces for DNA purification” AVS – The Science and Technology Society 56th International Symposium & Exhibition, S.Josè, CA, USA, November 8-13, 2009
133. Pasquardini, M. Vinante, L. Vanzetti, L. Lunelli, C. DellaVolpe, A. Lui, M. Giorcelli, A. Tagliaferro, M. Anderle, C. Pederzolli, “Non-Covalent Functionalization of Carbon Nanotubes for Biosensor Applications'', 13th European Conference on Applications of Surface and Interface Analysis (ECASIA’09), Antalya, Turkey, October 18-23 2009.
134. L. Pasquardini, M. Vinante, L. Lunelli, L. Vanzetti, M. Giorcelli, A. Tagliaferro, A. Sanginario, D. Demarchi, S. Zanarini, F. Paolucci, L. Prodi, M. Anderle, C. Pederzolli, “Oligonucleotide detection on non-covalently modified carbon nanotubes'', NanoSmart 2009 , Rome, Italy, October 19-22 2009.
135. L. Pasquardini, M. Vinante, L. Lunelli, L. Vanzetti, M. Giorcelli, A. Tagliaferro, A. Sanginario, D. Demarchi, S. Zanarini, F. Paolucci, L. Prodi, M. Anderle, C. Pederzolli, “Functionalized carbon nanotubes as electrodes in electrochemiluminescence biosensor, NanoBio Europe, Muenster (Germany)), June 15-17, 2010
136. L. Pasquardini, L. Lunelli, M. Vinante, C. Pederzolli, M. Anderle, F. Paolucci, L. Prodi, A. Sanginario, M. Giorcelli, S. Zanarini, D. Demarchi, A. Tagliaferro, “Functionalization of CNT electrodes for biosensing”, 5th Wide Bandgap Materials - progress in synthesis and applications, 7th Diamond & Related Films, 2nd International Workshop on Science and Applications of Nanoscale Diamond Materials , Zakopane (Poland), June 28-July 02, 2010
137. L. Marocchi, L. Lunelli, G. Viero, F. Piras, N. Arseni, A. Provenzani, C. Pederzolli, A. Quattrone and M. Anderle, “Polysomes interaction with self-assembled monolayers”, AVS 57th International Symposium & Exhibition , Albuquerque, New Mexico (USA), October 17-22, 2010
138. M.Anderle, “Maryland-Trento: a path for a strong collaboration” , International Workshop on “Building an international collaboration in scientific research: State of Maryland- Autonomous Province of Trento Experiment”, Trento, May 5th, 2011
139. F. Ghezzi , R. Caniello, D. Giubertoni, M. Bersani, D. Dallasega, A. Akola, M. Mayer, V. Rhode and M. Anderle, “Deuterium retention in W plasma-facing components”, 19th International Vacuum Conference (IVS-19) and International Conference on Nanoscience and Technology (ICN+T2013), Paris (F), September 9-13, 2013.
140. L.Pasquardini, S.Soria, S.Berneschi, D.Gandolfi, L.Lunelli, M.Ghulinyan, G.Pucker, G.Nunzi Conti, L.Pavesi, M.Anderle, C.Pederzolli, "Optical resonators for biosensing", 19th International Vacuum Conference (IVS-19) and International Conference on Nanoscience and Technology (ICN+T2013), Paris (F), September 9-13, 2013.
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